Partner Product / Failure Analysis Tools

Failure-Analysis Polishing & Etching Tools

Polishing and etching sample-preparation equipment for the failure and defect analysis of semiconductor devices.

Partner

Our Partner

About SUNYOU (Sanyu Seisakusho)

SUNYOU (Sanyu Seisakusho Co., Ltd.) is a manufacturing company headquartered in Hitachiota, Ibaraki, Japan. Its core business is the development and manufacture of semiconductor failure-analysis tools, plasma etching systems, and electron-microscope accessories, with an integrated production system spanning design, machining, and assembly.

ATE Service Corporation handles product introductions, selection, and deployment consultations for SUNYOU's semiconductor failure-analysis products. Please check the SUNYOU official website for the latest product information.

Lineup

Product Lineup

The main lineup of SUNYOU's products for semiconductor failure analysis. Please check the SUNYOU official website for detailed specifications.

Localized Device Polisher

Sample-preparation equipment that locally polishes the device surface to precisely expose the fault location.

Benchtop Precision Polisher

A benchtop precision polisher for cross-section observation of semiconductor devices and TEM sample preparation.

Benchtop Plasma Etching System

A compact plasma etching system for removing organic matter from device surfaces and preparing samples.

Minimal Micro-Plasma Etching System

A micro-plasma etching system using a world-first processing method specialized for localized areas.

Nano-Manipulation Stage

A manipulation stage that enables nanoscale operations inside an electron microscope.

Special TEM Holders / EM Sub-Stages

Holder and sub-stage products that extend observation with transmission electron microscopes (TEM).

Use Cases

Semiconductor Device Failure Analysis

Supports sample preparation (polishing/etching) and cross-section observation to identify fault locations in defective parts.

TEM / SEM Sample Preparation

Supports sample preparation for transmission (TEM) and scanning (SEM) electron microscopes.

Defect Cause Investigation

Useful for cross-section analysis of defective devices from the manufacturing process and for observing foreign matter and cracks.

R&D-Stage Evaluation

Also supports R&D uses such as structural evaluation of new devices, process verification, and materials analysis.